Mechanical Properties of ITO / Glass Thin Film by Indentation Method

J. Ocean Eng. Technol. 2007;21(1):59-63.

Yoon, Han-Ki;Kim, Do-Hyoung;Shin, Do-Hoon;Murakami, Ri-Ichi;

Department of Mechanical Engineering, Dong-Eui University;Department of Mechanical Engineering, Graduate School of Dong-Eui University;Department of Mechanical Engineering, Tokushima University;Department of Mechanical Engineering, Tokushima University;

나노인덴터에 의한 ITO / Glass 박막재의 기계적 특성

윤한기;김도형;신도훈;

동의대학교 기계공학과;동의대학교 대학원 기계공학과;토쿠시마대학 기계공학과;토쿠시마대학 기계공학과;

Keywords: Nano-indentation, Elastic modulus, Hardness, Indium tin oxide

핵심용어: 나노인덴테이션, 탄성계수, 경도, 인듐 주석 산화물

Abstract

The thin film of indium tin oxide (ITO) was prepared using the inclination opposite target type DC magnetron sputtering equipment onto the glass substrate at room temperature, using oxidized ITO with In2O3 and SnO2in a weight ratio of 9:1. The elastic modulus and hardness of the ITO thin films, prepared at different deposition conditions, were determined through anano-indentation experiment. The work pressure was varied from $2.6{ imes}10-1;to;8.3{ imes}10-1Pa$. The results show that the variation of work pressure during film deposition could vary significantly, according to the elastic modulus and hardness of the ITO thin films. It also can be seen that a minimum value exists in the film resistivity for the ITO thin films, prepared according to the variation of work pressure. However, the ITO film produced at room temperature had a microstructure in which a X ray diffraction peak is not clear, regardless of the work pressure.