Accurate Positioning of a Pneumatic Servo System

J. Ocean Eng. Technol. 1998;12(4):101-108.

Ji-Seong Jang;

Kyocera Corp., Fine Ceramic Division

공기압 서보 시스템을 이용한 정밀 위치 제어

장지성

Keywords: accurate positoning, servo table, extemally perssurized air bearing, friction,

핵심용어: 정밀 위치 제어, 서보 테이블, 정압베어링, 마찰력,

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METRICS

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